Proceedings of the Korean Society For Composite Materials Conference (한국복합재료학회:학술대회논문집)
- 2004.10a
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- Pages.19-22
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- 2004
Elastic Property Extraction System of Polycrystalline Thin-Films for Micro-Electro-Mechanical System Device and Application to Polycrystalline Materials
MEMS 부품을 위한 다결정 박막의 탄성 물성치 추출 시스템과 다결정 재료의 적용
- Published : 2004.10.01
Abstract
A numerical system to extract effective elastic properties of polycrystalline thin-films for MEMS devices is already developed. In this system, the statistical model based on lattice system is used for modeling the microstructure evolution simulation and the key kinetics parameters of given micrograph, grain distributions and deposition process can be extracted by inverse method proposed in the system. In this work, the effective elastic properties of polysilicon,