한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.1230-1233
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- 2004
산화물 초전도 박막 제작을 위한 오존의 평가
Evaluation of Ozone for Oxide Superconductor Thin Film Fabrication
- Lim, Jung-Kwan (Dongshin Uni.) ;
- Park, Yong-Pil (Dongshin Uni.) ;
- Lee, Hee-Kab (KCCI)
- 발행 : 2004.07.05
초록
Ozone is useful oxidizing gas for the fabrication of oxide thin films. Accordingly researching on oxidizing gas is required. In order to obtain high quality oxide thin films, higher ozone concentration is necessary. In this paper oxidation property was evaluated relation between oxide gas pressure and inverse temperature(CuO reaction). The obtained condition was formulated by the fabrication of Cu metal thin film by co-deposition using the ion Beam Sputtering method. Because the CuO phase peak appeared at the XRD evaluation of the CuO thin film using ozone gas, this study has succeeded in the fabrication of the CuO phase at