The study of electron drift velocity in $CF_4+Ar$ molecular gas mixture by 2-term and multi-term approximation of the Boltzmann equation

다항근사 및 2항근사 볼츠만 방정식을 이용한 $CF_4+Ar$ 혼합기체의 전자이동속도 연구

  • Published : 2004.07.05

Abstract

This paper describes the information for quantitative simulation of weakly ionized plasma. In previous paper, we calculated the electron transport coefficients in $CF_4+Ar$ gas mixture by using two-term approximation of Boltzmann equation. but there is difference between the result of the two-term and the multi-term approximation of the Boltzmann equation in $CF_4$ gas. Therefore, in this paper, we calculated the electron drift velocity (W) in $CF_4+Ar$ gas mixture for range of E/N values from $0.01\sim500[Td}$ at the temperature was 300[K] and pressure was 1[Torr] by multi-term approximation of the Boltzmann equation by Robson and Ness. The results of two-term and multi-term approximation of the Boltzmann equation has been compared with each other for a range of E/N.

Keywords