Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.726-729
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- 2004
Etching characteristics of PST thin films for tunable device application
Tunable 소자 응용을 위한 PST 박막의 식각특성
- Kim, Jong-Shik (Chung Ang University) ;
- Kim, Chang-Il (Chung Ang University)
- Published : 2004.07.05
Abstract
Etching characteristics of (Pb,Sr)