한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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- Pages.693-696
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- 2004
InGaP/GaAs HBT 적용을 위한 높은 절연강토의$1000{\AA}$ 실리콘 질화막 MIM capacitor제작과 특성 분석
Analysis of Properties and Fabrication of $1000{\AA}$ silicon nitride MIM capacitor with High Breakdown Electric Field for InGaP/GaAs HBT Application
- So, Soon-Jin (Knowledge*on Semiconductor Inc.) ;
- Oh, Doo-Suk (Knowledge*on Semiconductor Inc.) ;
- Sung, Ho-Kun (Knowledge*on Semiconductor Inc.) ;
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Song, Min-Jong
(Kyungju Health Coll) ;
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Park, Choon-Bae
(Wonkwang Uni.)
- 발행 : 2004.07.05
초록
For InGaP/GaAs HBT applications, we have developed characterized MIM capacitors with thin