한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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- Pages.547-550
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- 2004
산소 가스 유량비 변화에 따른 ITO 박막의 제작
Preparation of ITO thin films with $O_2$ gas ratio
- Kim, Geon-Hi (Kyungwon University) ;
- Keum, Min-Jong (Kyungwon University) ;
- Lee, Gyu-Sung (Samsung SDI) ;
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Kim, Han-Ki
(Samsung SDI) ;
- Kim, Kyung-Hwan (Kyungwon University)
- 발행 : 2004.11.11
초록
Indium tin oxide(ITO) films were prepared as a function of varying the proportion of oxygen