한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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- Pages.535-538
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- 2004
폴리머 기판위에 증착된 ZnO:Al 전도막의 특성연구
Characterization of conducting aluminium doped zinc oxide (ZnO:Al) thin films deposited on polymer substrates
- Koo, Hong-Mo (Division of Materials Science and Engineering, Hanyang University) ;
- Kim, Se-Hyun (Division of Materials Science and Engineering, Hanyang University) ;
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Park, Jong-Wan
(Division of Materials Science and Engineering, Hanyang University)
- 발행 : 2004.11.11
초록
Zinc Oxide (ZnO) films have attracted considerable attention for transparent conducting films, because of their high conductivity, good optical transmittance from UV to near IR as well as a low-cost fabrication. To increase the conductivity of ZnO, doping of group III elements (Al, Ga, In and B) has been carried out. Transparent conducting films have been applied for optoelectric devices, the development of the transparent conducting thin films on flexible light-weight substrates are required. In this research, the transparent conducting ZnO thin films doped with Aluminum (Al) on polymer substrates were deposited by the RF magnetron suputtering method, and the structural, optical and electrical properties were investigated.