Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.11a
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- Pages.477-480
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- 2004
Microstructure of ZnO:Ga Thin Films by RF magnetron sputtering
RF 스퍼터링법에 의한 ZnO:Ga 박막의 미세구조
- Kim, Byung-Sub (KyungSung uni.) ;
- Lee, Sung-Wook (KyungSung uni.) ;
- Lim, Dong-Gun (ChoongJoo Uni.) ;
- Park, Min-Woo (KyungSung Uni.) ;
- Kwak, Dong-Joo (KyungSung uni.)
- 김병섭 (경성대학교 전기전자공학과) ;
- 이성욱 (경성대학교 전기전자공학과) ;
- 임동건 (충주대학교 전자공학과) ;
- 박민우 (경성대학교 신소재공학과) ;
- 곽동주 (경성대학교 전기전자공학과)
- Published : 2004.11.11
Abstract
Ga doped zinc oxide films (ZnO:Ga) were deposited on glass substrate by RF magnetron sputtering from a ZnO target mixed with