한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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- Pages.448-451
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- 2004
스퍼터링 조건에 따른 바나듐 산화막의 감습 특성
Humidity-Sensitive Properties of Vanadium Oxide Thin Films on Sputtering Conditions
- Lee, Seung-Chul (Kongju Uni) ;
- Choi, Bok-Gil (Kongju Uni) ;
- Choi, Chang-Gyu (Seoul Uni of Technology) ;
- Kwon, Gwang-Ho (Hanseo Uni)
- 발행 : 2004.11.11
초록
Vanadium oxides have been widely used in a variety of technological applications such electrochromic devices as infrared detectors and are expected as a material suitable for gas sensing applications. Thin films of Vanadium oxide (VOx) have been deposited by r.f magnetron sputtering under different oxygen partial pressure ratios and substrate temperatures. Humidity-sensitive properties of resistive sensors having interdigitated electrode structure are characterized. Our sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide films deposited with 0%