산화물 초전도 선재의 기초물성

Properties of Ceramics Superconducting Tapes

YBaCuO thick films were fabricated by plasma enhanced chemical vapor deposition, and the crystallinity and the superconducting properties were investigated. The growth temperature to obtain the thick films was decreased by around $150^{\circ}C$ due to plasma enhancement. The zero resistivity temperatures for films grown at $590^{\circ}C$ and $620^{\circ}C$ were 55 and 80 K, resistively.