한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)

한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지

FeO:ZnO막의 구조적 및 전기적 특성

Structural and electrical Properties of FeO:ZnO Films

  • 최무희 (경상대학교 전기전자공학부) ;
  • 안현진 (경상대학교 전기전자공학부) ;
  • 마대영 (경상대학교 전기전자공학부)
  • Choi, Mu-Hee (Division of Electrical & Electronic Engineering, Gyeongsang National University) ;
  • Ahan, Hyun-Jin (Division of Electrical & Electronic Engineering, Gyeongsang National University) ;
  • Ma, Tae-Young (Division of Electrical & Electronic Engineering, Gyeongsang National University)
  • 발행 : 2004.11.11
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초록

Iron-doped ZnO films or zinc-doped $Fe_2O_3$ films were prepared by ultrasonic spray pyrolysis. Iron cholide and zinc acetate were used as a precursor for Fe and Zn, respectively. XRD and SEM were carried out to study the crystallinity and morphology of the films. Atomic composition of the films were identified by EPMA ansd XPS. Resistivity variation with the composition rate was studied.

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