한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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- Pages.187-190
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- 2004
QMS를 이용한 PST 박막의 식각 특성
Etching characteristics of PST thin films using quderupole mass spectrometry
- Kim, Jong-Sik (ChungAng Uni.) ;
- Kim, Gwan-Ha (ChungAng Uni.) ;
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Kim, Kyoung-Tae
(ChungAng Uni.) ;
- Kim, Dong-Pyo (KDG Eng.) ;
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Kim, Chang-Il
(ChungAng Uni.)
- 발행 : 2004.11.11
초록
In this study, PST thin films were etched with inductively coupled