한국음향학회:학술대회논문집 (Proceedings of the Acoustical Society of Korea Conference)
- 한국음향학회 2004년도 추계학술발표대회논문집 제23권 2호
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- Pages.313-316
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- 2004
임의의 공정 변화에 따른 진공펌프의 소음${\cdot}$ 진동 평가를 위한 MFC 컨트롤 시스템 개발
Development of The MFC Control System for Evaluating Noise and Vibration of Vacuum Pump According to Arbitrary Process Change
- Ryu Jedam (Acoustics & Vibration Group, Korea Research Institute of Standards and Science) ;
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Cheung Wansup
(Acoustics & Vibration Group, Korea Research Institute of Standards and Science) ;
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Lim Jong Yeon
(Center for Vacuum Technology, Korea Research Institute of Standards and Science) ;
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Hong Dongpyo
(Chonbuk National University)
- 발행 : 2004.11.01