Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference (한국조명전기설비학회:학술대회논문집)
- 2004.05a
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- Pages.475-478
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- 2004
The discharge characteristic of plasma reactor for $CF_4$ decomposition
$CF_4$ 분해용 플라즈마 반응기의 방전 특성
Abstract
we studied the effect of the type of non-thermal plasma on the decomposition of
Keywords