대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

SiOG 기판을 이용한 초소형 가속도계의 설계 및 제작

Design and fabrication of micromachined accelerometer using SiOG substrate

  • 정형균 (서울대학교 전기.컴퓨터공학부) ;
  • 안시홍 ((주)인텔리마이크론즈) ;
  • 박치현 ((주)인텔리마이크론즈) ;
  • 이준영 (서울대학교 전기.컴퓨터공학부) ;
  • 전승훈 (서울대학교 전기.컴퓨터공학부) ;
  • 김용권 (서울대학교 전기.컴퓨터공학부)
  • Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Ahn, Si-Hong (Intellimicrons Co., Ltd.) ;
  • Park, Chi-Hyun (Intellimicrons Co., Ltd.) ;
  • Lee, June-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jeon, Seung-Hoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 발행 : 2004.11.05
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초록

This paper presents design and fabrication of micromachined accelerometer using $100{\mu}m$ thick SiOG substrate. The proposed accelerometer has a resonant frequency, 6kHz. To reduce the off-axis sensitivity of the accelerometer, the mode characteristic of the accelerometer is investigated using ANSYs modal analysis. Because the accelerometer is fabricated using an SiOG substrate, it is expected to be integrated as one-chip IMU sensor with a gyroscope using an SiOG substrate.

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