대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.187-190
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- 2004
유도결합플라즈마를 이용한 BST 박막의 건식 식각 특성
Dry etching of BST thin films using inductively coupled plasma
- Kim, Gwan-Ha (ChungAng University) ;
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Kim, Kyoung-Tae
(ChungAng University) ;
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Kim, Chang-Il
(ChungAng University) ;
- Kim, Dong-Pyo (KDG Engineering) ;
- Lee, Cheol-In (AnSan College of Technology) ;
- Kim, Tae-Hyung (YeoJoo Technical College)
- 발행 : 2004.11.05
초록
In this work, we investigated etching characteristics and mechanism of BST thin films using
키워드