대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.150-152
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- 2004
13.56MHz ICP에서 단일 탐침법에 의한 Ne 가스의 발광특성 연구
A Study on Emission Characteristics of Ne Gas Using a Single Langmuir Probe Method in Radio-Frequency Inductively Coupled Plasma
- Jo, Ju-Ung (Wonkwang University) ;
- Choi, Yong-Sung (Wonkwang University) ;
- Kim, Yong-Kab (Wonkwang University) ;
- Park, Dae-Hee (Wonkwang University)
- 발행 : 2004.11.05
초록
In recent, there have been several developments in lamp technology that promise savings in electrical power consumption and improved quality of the lighting space. The electrodeless fluorescent lamp is intended as a high efficacy replacement for the incandescent reflector lamp in many applications. In this paper, electron temperature and electron density were measured in a radio-frequency inductively coupled plasma using a Langmuir probe method for emission characteristics. Measurement was conducted in an Ne discharge for pressure from 10 [mTorr] and input RF power 100 [W] to 150 [W]. As for the electron density, a electron temperature was more distinguished for a emission characteristic. The results of ideal may contribute to systematic understanding of a electrodeless fluorescent lamps of emission characteristics.