대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)

대한전기학회 (The Korean Institute of Electrical Engineers)
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솔젤법에 의해 제작된 $TiO_2-SnO_2$ 박막의 유전적, 전기적 특성

Dielectric, Electrical Properties of $TiO_2-SnO_2$ Thin Films Fabricated using Sol-Gel Method

  • 발행 : 2004.11.05
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초록

$TiO_2-SnO_2$ thin films are fabricated using sol-gel method. The thickness of thin films increase about $0.03{\sim}0.04{\mu}m$ every a dipping. The permittivity and dissipation factor of $TiO_2-SnO_2$ thin films decrease with increasing frequency. Thin films show semiconductive characteristics above $400^{\circ}C$.

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