대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 추계학술대회 논문집 전기물성,응용부문
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- Pages.54-57
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- 2004
펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구
Annealing Effect on the structural and optical properties of ZnO thin films prepared by Pulsed Laser Deposition
- Kim, Jae-Hong (Department of Electrical Engineering Inha University) ;
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Lee, Cheon
(Department of Electrical Engineering Inha University)
- 발행 : 2004.11.05
초록
ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 m. During deposition, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of
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