Annealing Effect on the structural and optical properties of ZnO thin films prepared by Pulsed Laser Deposition

펄스레이저 증착법으로 성장된 ZnO 박막의 어닐링 온도변화에 따른 구조적, 광학적 특성에 관한 연구

  • Kim, Jae-Hong (Department of Electrical Engineering Inha University) ;
  • Lee, Cheon (Department of Electrical Engineering Inha University)
  • 김재홍 (인하대학교 전기공학과 레이저연구실) ;
  • 이천 (인하대학교 전기공학과 레이저연구실)
  • Published : 2004.11.05

Abstract

ZnO thin films on (001) sapphire substrates have been deposited by pulsed laser deposition(PLD) technique using an Nd:YAG laser with a wavelength of 266 m. During deposition, the experiment of the deposition of ZnO thin films has been performed for substrate temperatures in the range of $400^{\circ}C$ and flow rate of 350 sccm, films have been annealed at various substrate temperatures after deposition. After post-annealing treatment in the oxygen ambient, the structural properties of ZnO thin films were characterized by diffraction (XRD), SEM and the optical of the ZnO were characterized by photoluminescence (PL).

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