Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Design of MEMS Gyroscope Using Multi Mass System

다중 질량 시스템을 이용한 자이로스코프 설계

  • Jeon, Seung-Hoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Lee, June-Young (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Jung, Hyoung-Kyoon (School of Electrical Engineering and Computer Science, Seoul National University) ;
  • Chang, Hyun-Kee (Intellimicrons Co., Ltd.) ;
  • Kim, Yong-Kweon (School of Electrical Engineering and Computer Science, Seoul National University)
  • 정슨훈 (서울대학교 전기컴퓨터공학부) ;
  • 이준영 (서울대학교 전기컴퓨터공학부) ;
  • 정형균 (서울대학교 전기컴퓨터공학부) ;
  • 장현기 ((주)인텔리마이크론즈) ;
  • 김용권 (서울대학교 전기컴퓨터공학부)
  • Published : 2004.11.05
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Abstract

In this paper, new design concept of MEMS gyroscope using multi mass system is proposed. The gyroscope having wide bandwidth was designed utilizing the multi mass system in order to reduce the degradation of the performance by resonance variation. The multi mass system has more than two masses and separates the resonant peak of each mass. Using MATLAB, the variation of bandwidth and driving displacement according to mass ratio of the multi mass system was analyzed. This result was compared with that of current single mass system gyroscope. In the 7 kHz resonant frequency design, the multi mass system has 395.3Hz bandwidth, which is six times larger than single mass system bandwidth, 58.5 Hz.

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