Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2004.10a
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- Pages.1500-1503
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- 2004
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- 2005-8446(pISSN)
A Measurement Method of Surface Morphology Based on Depth-from-Focus with Magnification Variations of Optical System
광학계의 배율 변화를 고려한 DFF 기반의 형상 측정법
Abstract
Errors resulting from magnification variations of optical system are largely generated in three-dimensional shape measurements. In the case of measuring the surface morphology of tiny objects based on DFF, images are acquired with a very small interval and then magnification changes are minimized. However, the magnification variations are actually existed in optical system and so focus measures in DFF are wrongly or ambiguously extracted. in this paper, a methodology based on DFF with the magnification changes is proposed to make more accurate measurement in surface morphology with high depth discontinuity, compared with previous ones. Several experiments show that the proposed method outperforms existing ones without magnification changes.
Keywords