Defect Evaluation of Optical Lens by Resonant Ultrasound Spectroscopy

공명초음파분광법을 활용한 광학기기용 렌즈의 결함평가

In this paper, resonant ultrasound spectroscopy(RUS) was used to determine the natural frequency of a spherical and a aspherical lens. The objective of the paper is to evaluate defect and shape error by using nondestructive evaluation method with Resonant Ultrasound Spectroscopy(RUS). The principle of RUS is that the mechanical resonant frequency of the materials depends on density, and the coefficient of elasticity. We evaluated existence of flaws through comparison with resonant frequency of a spherical and a aspherical lens. The spherical glass lenses were made of BK-7 glass, one's diameter in 2mm and 5mm. The polished spherical glass lenses had no deflection or a deflection below 2.0${\mu}{\textrm}{m}$. Also, The aspherical lens were made of same material and ones diameter in 7mm and thickness in 3.4mm. In the experiment, we were performed to investigate relationship between frequency measuring parameter($\beta$) and mass of each specimens. The difference between resonant frequency and mode of aspherical glass lens which has no defect was distinguished from aspherical glass lens which has some defects.