샤도우 증착 효과를 이용한 마이크로 채널내 측벽 전극 제작

Fabrication of electrodes on mcirochannel side wall using shadow evaporation effect

A new method to fabricate metal electrodes on side wall of the microchannel is presented. Coulter counter allows to count the number of cell passing through the microchannel by detecting impedance variation between two electrodes. The relative position of two electrodes is important for sensitivity of impedance measurement. 100nm thick Al electrodes are deposited on the channel side wall by means of shadow evaporation.