Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2004.10a
- /
- Pages.1109-1112
- /
- 2004
- /
- 2005-8446(pISSN)
Nanopatterning using Machining Force Sensing Module
미세 가공력 검출기구를 이용한 나노패터닝
Abstract
This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80
Keywords