Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2004.10a
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- Pages.564-567
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- 2004
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- 2005-8446(pISSN)
Design for High Voltage Generator of Electron Beam Manufacturing System
전자빔 가공기를 위한 고전압 발생 장치 설계
Abstract
In the manufacture of integrated circuits, photolithography is the lowest yield step in present production lines. Electron beams form a powerful set of tools with which to attack this problem. Electron beams can be used to make patterns that are smaller than can a photolithography. We design a high voltage generator of electron beam manufacturing system. For this purpose, first, the configuration of electron beam manufacturing system was analyzed. Second, the basic configuration of a high voltage generator and test results were presented.