Compensator Design to Improve the Dynamic Performance of Piezoelectric Actuators

압전 구동 소자의 동적 성능 향상을 위한 보상기의 설계

This paper attempts to compensate the nonlinearity between the input voltage and the output displacement of the piezoelectric stack in dynamic actuation by the following two ways. Firstly, the charge steering by circuit configuration reduces the hysteresis of piezoelectric actuator remarkably. However, it makes the ripple in positioning due to the phase lag and noise induced from the elements of the long closed loop. Secondly, the feedforward control by neural network compensates the hysteresis of the piezoelectric actuators effectively with the appropriate selection of the input variables for the training. The improvement of the dynamic performance of the piezoelectric actuators by the developed linearization technique is verified by experiments.