EXPRESS - CONTROL OF THIN FILM TECHNOLOGIES BY ANODIZATION SPECTROSCOPY METHOD

It is the new promising method of obtaining the information about the state of a surface of a solid body, thin and multilayer structures. An idea of the method consists in reading and analyzing the relations U(t), dU/dt(t), dU/dt(U) on an electrical cell when anodizing an investigated object. By these relation it is possible to control the presence of impurities in the metal on the path of the anodization front, a structure and characteristics of the object being oxidized as well as of an oxide which is being formed during anodizing, the change in composition of the oxide layer, the thickness and composition of metallic and dielectric layers being a part of the layers boundaries.