Novel grinding control method for nanometric surface roughness for space optical surfaces

  • Han, Jeong-Yeol (Department of Astronomy and Space Science, University of Science and Technology/Korea Astronomy Observatory) ;
  • Kim, Sug-Whan (Space Optics Laboratory, Department of Astronomy, Yonsei University) ;
  • Kim, Geon-Hee (Ultra-Precision Engineering Laboratory, Korea Basic Science Institute) ;
  • Kim, Ju-Whan (Ultra-Precision Engineering Laboratory, Korea Basic Science Institute)
  • 발행 : 2004.04.01

초록

Traditional bound abrasive grinding leaves the machine marks and subsurface damages ranging from 1 to few tens microns ms in height. These are removed typically by subsequent craftmen-based loose abrasive lapping, polishing and figuring. Using the multi-variable regression technique, we established a new automated grinding process control method for the removal of loose abrasive lapping from the traditional fabrication process. (omitted)

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