Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)
- 2004.04a
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- Pages.538-541
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- 2004
Nanoelectyomechanical Resonator Design and Performance Analysis
- T. J. Kouh (Aerospace and Mechanical Engineering, Boston University) ;
- Kim, D. H. (School of Mechanical Design and Automation Engineering, Seoul National University of Technolog) ;
- K. L. Ekinci (Aerospace and Mechanical Engineering, Boston University)
- Published : 2004.04.01
Abstract
We describe a method for the detection of nanometer scale displacements of nanoelectromechanical resonators. We also present an analysis of the mechanical motion of these devices. We evaluate the effectiveness of the detection technique by detecting displacements from a series of nanomechanical doubly clamped beam resonators with decreasing dimensions.
Keywords
- nanoelectromechanical systems;
- optical interferometry;
- displacement detection;
- resonator;
- fabrication