Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
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Review of A High Precision Actuator Mechanism Using PZT

PZT를 이용한 초정밀 구동의 문헌적 고찰

  • 최현석 (한양대학교 기계공학과) ;
  • 이준 (한양대 대학원 정밀기계공학과) ;
  • 정명철 (한양대 대학원 정밀기계공학과) ;
  • 윤덕원 (한양대 대학원 정밀기계공학과) ;
  • 한창수 (한양대 기계정보경영학부) ;
  • 홍원표 (한국생산기술연구원) ;
  • 강응구 (한국생산기술연구원) ;
  • 최헌종 (한국생산기술연구원)
  • Published : 2004.04.01
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Abstract

Recently High precision positioning device is used in many kinds of manufacturing and scientific instruments. Piezoelectric transducer is applied to the positioning devive as actuator, PZT has a high resolution, however, moving range is short. Many researcher have developed the mechanism for increasing a motion range. The types of increasing motion range mechanism with PZT are inertial slider, friction driver, ultrasonic motor, etc. In this paper we discuss the review of the hish precision actuator mechanism with PZT. Many kinds of mechanism for high precision are shown and compared.

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