Proceedings of the Korean Society of Machine Tool Engineers Conference (한국공작기계학회:학술대회논문집)

The Korean Society of Manufacturing Technology Engineers (한국생산제조학회)
권호 표지

Beam stability improvement of a liquid metal ion source

액체 금속 이온원의 빔 안정도 향상

  • 현정우 (광운대학교 전자물리학과) ;
  • 임연찬 (광운대학교 전자물리학) ;
  • 김성수 (광운대학교 전자물리학) ;
  • 박철우 (한국산업기술대학교 기계공학) ;
  • 이종항 (한국산업기술대학교 기계공학) ;
  • 강승언 (광운대학교 전자물리학과)
  • Published : 2004.04.01
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Abstract

Previous studies on the liquid Gallium ion sources used an electro-chemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this work, a new structure is proposed that replaces the coil-type heater. It uses a Gallium reservoir made of six pre-etched 250 $\mu\textrm{m}$ tungsten wires that surround the needle electrode. Gallium loading at the reservoir is observed to be much more stable, resulting in an improved beam stability.

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