Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2004.04b
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- Pages.36.3-36.3
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- 2004
Influence of Assisted lon Energy on Properties of Transparent $SiO_x$ Thin Films Deposited by Dual Ion Beam Sputtering (DIBS)
- Seong J.W (R & D Center, P & I Co.) ;
- Yoon K. H. (Department of Ceramic Engineering, Yonsei University) ;
- Kim K. H. (R & D Center, P & I Co.) ;
- Koh S. K. (R & D Center, P & I Co.)
- Published : 2004.04.01
Abstract
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