Proceedings of the Korean Society for Technology of Plasticity Conference (한국소성가공학회:학술대회논문집)
- 2004.11a
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- Pages.255-259
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- 2004
Fabrication of 3-D Micro Structure and Micro Tool Using MEDM
미세 방전을 이용한 3차원 미세 구조물 제작 및 미세 공구 제작
- Lee Y. S. ;
- Kim B. H. ;
- Yi S. M. ;
- Chu C. N. ;
- Kang Y. H. (K-metro) ;
- Choi T. H. ;
- Park H. J.
- 이영수 (서울대학교 기계항공공학부) ;
- 김보현 (서울대학교 기계항공공학부) ;
- 이상민 (서울대학교 기계항공공학부) ;
- 주종남 (서울대학교 기계항공공학부) ;
- 강영훈 ;
- 최태훈 (한국생산기술연구원) ;
- 박훈재 (한국생산기술연구원)
- Published : 2004.11.01
Abstract
3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.