대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 하계학술대회 논문집 C
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- Pages.1737-1739
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- 2004
태양전지 응용을 위한 DLC(Diamond-like Carbon) 반사방지막의 특성 분석
Diamond-like Carbon Protective Anti-reflection Coating for Solar Cell Application
- 최원석 (성균관대학교 정보통신공학부) ;
- 전영숙 (성균관대학교 정보통신공학부) ;
- 김경해 (성균관대학교 정보통신공학부) ;
-
이준신
(성균관대학교 정보통신공학부) ;
- 허진희 (성균관대학교 정보통신공학부) ;
-
정일섭
(성균관대학교 정보통신공학부) ;
-
홍병유
(성균관대학교 정보통신공학부)
- Choi, Won-Seok (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Jeon, Young-Sook (School of Information and Communication Engineering, Sungkyunkwan University) ;
- Kim, Kyung-Hae (School of Information and Communication Engineering, Sungkyunkwan University) ;
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Yi, Jun-Sin
(School of Information and Communication Engineering, Sungkyunkwan University) ;
- Heo, Jin-Hee (School of Information and Communication Engineering, Sungkyunkwan University) ;
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Chung, Il-Sub
(School of Information and Communication Engineering, Sungkyunkwan University) ;
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Hong, Byung-You
(School of Information and Communication Engineering, Sungkyunkwan University)
- 발행 : 2004.07.14
초록
Diamond-like carbon (DLC) films were prepared with RF-PECVD (Plasma Enhanced Chemical Vapor Deposition) method on coming glass and silicon substrates using methane (
키워드