대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2004년도 하계학술대회 논문집 D
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- Pages.2492-2494
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- 2004
자기부상방식의 능동 미세진동 제어시스템
Active Microvibration Control System Using Maglev Actuator
초록
A system, featuring the electromagnetic levitation actuator for control in the vertical direction, of active microvibration control was proposed. The main components of this system are a vibration isolation table with built-in acceleration sensors for detecting microvibration, electromagnetic levitation actuators with built-in permanent magnets and electromagnets, and a digital controller with high precision signal converters.
키워드