Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.10a
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- Pages.185.1-185
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- 2003
Changes of Properties of ITO Thin Film Caused by Rapid Thermal Annealing
저온증착한 ITO 박막의 RTA 처리에 따른 특성변화
- Published : 2003.10.17
Abstract
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