Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.04a
- /
- Pages.192.2-192
- /
- 2003
Formation, Characterization and Applicatoin of Self-patternable PZT Thin Film
- Hwang, Jae-Seob (Department of Ceramic Engineering, Yonsei University) ;
- Kang, Ghi-Yuun (Department of Ceramic Engineering, Yonsei University, Microsystem Center, Korea Institute of Science and Technology) ;
-
Park, Hyung-Ho
(Department of Ceramic Engineering, Yonsei University)
;
-
Kim, Tae-Song
(Microsystem Center, Korea Institute of Science and Technology)
- Published : 2003.04.18
Abstract
Keywords