Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.04a
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- Pages.189.1-189
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- 2003
Effect of COmposition Ratio on the Properties of PZT Films Made by MOCVD Using Ultrasonic Nebulization
초음파분무 MOCVD법으로 증착된 PZT막에 미치는 조성비의 영향
Abstract
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