Proceedings of the Korean Ceranic Society Conference (한국세라믹학회:학술대회논문집)
- 2003.04a
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- Pages.37.2-37
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- 2003
The Reliability Test using SILC of Gate Dielectrics Made of ($HfO_2-Al_2O_3$ ) Multilayers
SILC(Stress Induced Leakage Current)를 이용한 하프늄산화막-알루미나($HfO_2-Al_2O_3$ ) 적층 유전반막의 전기적 신뢰성 실험
- Published : 2003.04.18
Abstract
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