Effect of bias on TiN coatings prepared by vacuum are deposition

  • Huang, M.D. (Quantum Optical Research Center and Department of Physics, Hanyang University) ;
  • Lee, Y.P. (Quantum Optical Research Center and Department of Physics, Hanyang University) ;
  • Dong, C. (State Key Laboratory for Materials Modification, Department of Materials Engineering, Dalian University of Technology) ;
  • Wen, L.S. (State Key Laboratory for Materials Modification, Department of Materials Engineering, Dalian University of Technology)
  • 발행 : 2003.02.14