Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.206-206
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- 2003
Effect of bias on TiN coatings prepared by vacuum are deposition
- Huang, M.D. (Quantum Optical Research Center and Department of Physics, Hanyang University) ;
- Lee, Y.P. (Quantum Optical Research Center and Department of Physics, Hanyang University) ;
- Dong, C. (State Key Laboratory for Materials Modification, Department of Materials Engineering, Dalian University of Technology) ;
- Wen, L.S. (State Key Laboratory for Materials Modification, Department of Materials Engineering, Dalian University of Technology)
- Published : 2003.02.14
Abstract
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