Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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Standardization of the Evaluation of SIMS Depth Resolution by a Standard Procedure and Multiple Delta-Layer Thin Films

  • Kim, Kyung-Joong (Nano Surface Group, Korea Research Institute of Standards and Science) ;
  • Kim, H.K. (Nano Surface Group, Korea Research Institute of Standards and Science) ;
  • Moon, D.W. (Nano Surface Group, Korea Research Institute of Standards and Science)
  • Published : 2003.02.14
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