한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2003년도 제24회 학술발표회 초록집
- /
- Pages.143-143
- /
- 2003
MOCVD growth of $RuO_{2}$ thin films on Si(001) substrates using(${\eta}^{6}$ -benzene)(${\eta}^{4}$ -1,3-cyclohexa diene)Ru
- Hwang, H.N. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
- Han, K.C. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
- An, K.S. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
- Lee, S.S. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
- Chung, T.M. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
- Kim, Y. (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
- 발행 : 2003.02.14