Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.122-122
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- 2003
Post-annealing effects on the properties of ZnO thin films for Film Bulk Acoustic Resonator
- Kim, Sun-Wook (Department of Electronic Engineering, Kyungwon University) ;
- Kim, Sun-Yung (Department of Electronic Engineering, Kyungwon University) ;
- Kim, Soo-GiL (Department of Electronic Engineering, Kyungwon University) ;
- Koh, Jung-Hyuk (Korea Electrotechnology Research Institute) ;
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Lee, Neung-Heon
(Department of Electronic Engineering, Kyungwon University)
;
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Shin, Young-Hwa
(Department of Electronic Engineering, Kyungwon University)
- Published : 2003.02.14
Abstract
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