Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.115-116
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- 2003
Low-temperature atomic layer deposition of AlN thin films using plasma interactions
- Lee, Yong-Ju (Korea Advanced Institute of Science and Technology (KAIST), Department of Materials Science and Engineering) ;
- Kang, Sang-Won (Korea Advanced Institute of Science and Technology (KAIST), Department of Materials Science and Engineering)
- Published : 2003.02.14
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