Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.72-72
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- 2003
Preparation of Metallic Cu Thin Films by MOCVD Using Novel Organometallic Cu(II) Precursors
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Lee, Sun-Sook
(Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
;
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Park, Jung-Woo
(Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
;
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Chung, Taek-Mo
(Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
;
- Kim, Chang-Gyoun (Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology) ;
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Kim, Yun-Soo
(Thin Film Materials Laboratory, Advanced Materials Division, Korea Research Institute of Chemical Technology)
- Published : 2003.02.14
Abstract
Keywords