Atmospheric RF plasma effects on the film adhesion property of polymer metallization process

  • Chung, Yun M. (Center for Advanced Plasma Surface Technology Sungkyunkwan univ.) ;
  • Jung, Min J. (Center for Advanced Plasma Surface Technology Sungkyunkwan univ.) ;
  • Han, Jeon G. (Center for Advanced Plasma Surface Technology Sungkyunkwan univ.)
  • Published : 2003.02.14