Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.02a
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- Pages.67-67
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- 2003
Atmospheric RF plasma effects on the film adhesion property of polymer metallization process
- Chung, Yun M. (Center for Advanced Plasma Surface Technology Sungkyunkwan univ.) ;
- Jung, Min J. (Center for Advanced Plasma Surface Technology Sungkyunkwan univ.) ;
- Han, Jeon G. (Center for Advanced Plasma Surface Technology Sungkyunkwan univ.)
- Published : 2003.02.14
Abstract
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