Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2003.08a
- /
- Pages.205-205
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- 2003
Two-dimensional Simulation for Magnetically Enhanced Large-Area Processing Plasma
- Cho, B.-U. (Department of Electronic and Electrical Engineering Pohang University of Science and Technology) ;
- Shulika, Olga (Department of Electronic and Electrical Engineering Pohang University of Science and Technology) ;
- Lee, S.-H. (Department of Electronic and Electrical Engineering Pohang University of Science and Technology) ;
- Lee, Y.-J. (Department of Materials Engineering, Sungkyunkwan University) ;
- Kim, K.-N. (Department of Materials Engineering, Sungkyunkwan University) ;
-
Yeom, G.-Y.
(Department of Materials Engineering, Sungkyunkwan University)
;
- Lee, J.-K. (Department of Electronic and Electrical Engineering Pohang University of Science and Technology)
- Published : 2003.08.20
Abstract
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